Semiconductor Device Having an Active Trench and a Body Trench

ABSTRACT

A semiconductor substrate having a first main surface and a transistor cell includes a drift region, a body region between the drift region and the first main surface, an active trench at the first main surface extending into the drift region, a gate insulating layer at sidewalls and a bottom side of the active trench, a gate conductive layer in the active trench, a source region in the body region, and adjacent to the active trench, a body trench at the first main surface extending into the drift region, the body trench being adjacent to the body region and to the drift region, an insulating layer at sidewalls and at a bottom side of the body trench, the insulating layer being asymmetric with respect to an axis extending perpendicular to the first main surface at a center of the body trench, and a conductive layer in the body trench.

BACKGROUND

Semiconductor devices such as field effect transistors (FETs) andinsulated gate bipolar transistor (IGBTs) are widely used in a broadfield, e.g. automotive and industrial applications.

It is desirable to provide a semiconductor device having reducedswitching and conducting losses, improved electrical characteristics andan improved SOA (safe operation area).

SUMMARY

According to an embodiment, a semiconductor device in a semiconductorsubstrate including a first main surface includes a transistor cell. Thetransistor cell includes a drift region of a first conductivity type, abody region of a second conductivity type between the drift region andthe first main surface, an active trench at the first main surfaceextending into the drift region, a gate insulating layer at sidewallsand at a bottom side of the active trench, a gate conductive layer inthe active trench, and a source region of the first conductivity type inthe body region adjacent the active trench. The transistor cell furtherincludes a body trench at the first main surface extending into thedrift region, the body trench being adjacent to the body region and tothe drift region, an insulating layer at sidewalls and at a bottom sideof the body trench, the insulating layer being asymmetric with respectto an axis extending perpendicular to the first main surface at a centerof the body trench, and a conductive layer in the body trench.

According to an embodiment, a semiconductor device in a semiconductorsubstrate including a first main surface includes a transistor cell. Thetransistor cell comprises a drift region of a first conductivity type, abody region of a second conductivity type between the drift region andthe first main surface, an active trench at the first main surfaceextending into the drift region, a gate insulating layer at sidewallsand at a bottom side of the active trench, a gate conductive layer inthe active trench, and a source region of the first conductivity type inthe body region adjacent to the active trench. The transistor cellfurther comprises a first body trench at the first main surfaceextending into the drift region, the body trench being adjacent to thebody region and to the drift region, an insulating layer at sidewallsand at a bottom side of the body trench, the insulating layer having alarger thickness than a thickness of the gate insulating layer, and aconductive layer in the body trench.

According to a further embodiment, a semiconductor device in asemiconductor substrate including a first main surface includes atransistor cell. The transistor cell comprises a drift region of a firstconductivity type, a body region of a second conductivity type betweenthe drift region and the first main surface, an active trench at thefirst main surface extending into the drift region, a gate conductivelayer in the active trench, and a source region of the firstconductivity type in the body region adjacent to the active trench. Thetransistor cell comprises at least a first body trench and a second bodytrench at the first main surface extending into the drift region, thefirst and second body trenches being adjacent to the body region and tothe drift region, further source regions of the first conductivity typein the body region adjacent to at least one of the first and the secondbody trenches, at least one of the further source regions beingdisconnected from a source terminal, an insulating layer at sidewallsand at a bottom side of each of the first and second body trenches, anda conductive layer in each of the first and second body trenches. Atleast one of the first and second body trenches is different from theactive trench.

According to an embodiment, a semiconductor device in a semiconductorsubstrate including a first main surface includes a transistor cell. Thetransistor cell comprises a drift region of a first conductivity type, abody region of a second conductivity type, between the drift region andthe first main surface, an active trench at the first main surfaceextending into the drift region, a gate conductive layer being disposedin the active trench, and a source region of the first conductivity typein the body region adjacent to the active trench. The transistor cellcomprises at least a first body trench and a second body trench at thefirst main surface extending into the drift region, the first and secondbody trenches being adjacent to the body region and to the drift region,an insulating layer at sidewalls and at a bottom side of each of thefirst and second body trenches, and a conductive layer in each of thefirst and second body trenches. The first and the second body trenchesare different from each other.

According to an embodiment, a semiconductor device formed in asemiconductor substrate including a first main surface, comprises adrift region of a first conductivity type, a body region of a secondconductivity type, the body region being disposed between the driftregion and the first main surface, a first transistor cell and a secondtransistor cell. Each of the first and second transistor cells comprisesan active trench at the first main surface and extending into the driftregion, a gate conductive layer disposed in the active trench, and asource region formed in the body region adjacent to the active trench.The semiconductor device further comprises body trenches disposedbetween the first and the second transistor cells and further sourceregions, the body trenches being formed in the first main surface andextending into the drift region. The body trenches are adjacent to thebody region and the drift region. A conductive material in at least oneof the body trenches is connected with a gate terminal and at least oneof the further source regions disposed between the body trenches isdisconnected from a source terminal.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the present invention and are incorporated in andconstitute a part of this specification. The drawings illustrate theembodiments of the present invention and together with the descriptionserve to explain the principles of the invention. Other embodiments ofthe present invention and many of the intended advantages of the presentinvention will be readily appreciated as they become better understoodby reference to the following detailed description. The elements of thedrawings are not necessarily to scale relative to each other. Likereference numerals designate corresponding similar parts.

FIGS. 1A and 1B illustrate examples of a cross-sectional view of asemiconductor device according to an embodiment;

FIG. 2A illustrates a cross-sectional view of a semiconductor deviceaccording to a further embodiment;

FIG. 2B illustrates a cross-sectional view of a semiconductor deviceaccording to a further embodiment;

FIGS. 3A, 3B and 3C show simulation results of the embodimentsillustrated in FIGS. 1 and 2A;

FIGS. 4A and 4B show cross-sectional view of a semiconductor deviceaccording to a further embodiment; and

FIGS. 5A and 5B show simulation results obtained for the semiconductordevice illustrated in FIG. 4.

DETAILED DESCRIPTION

In the following detailed description reference is made to theaccompanying drawings, which form a part hereof and in which areillustrated by way of illustration specific embodiments in which theinvention may be practiced. In this regard, directional terminology suchas “top”, “bottom”, “front”, “back”, “leading”, “trailing” etc. is usedwith reference to the orientation of the Figures being described. Sincecomponents of embodiments of the invention can be positioned in a numberof different orientations, the directional terminology is used forpurposes of illustration and is in no way limiting. It is to beunderstood that other embodiments may be utilized and structural orlogical changes may be made without departing from the scope defined bythe claims.

The description of the embodiments is not limiting. In particular,elements of the embodiments described hereinafter may be combined withelements of different embodiments.

The terms “wafer”, “substrate” or “semiconductor substrate” used in thefollowing description may include any semiconductor-based structure thathas a semiconductor surface. Wafer and structure are to be understood toinclude silicon, silicon-on-insulator (SOI), silicon-on sapphire (SOS),doped and undoped semiconductors, epitaxial layers of silicon supportedby a base semiconductor foundation, and other semiconductor structures.The semiconductor need not be silicon-based. The semiconductor could aswell be silicon-germanium, germanium, or gallium arsenide. According toembodiments of the present application, generally, silicon carbide (SiC)or gallium nitride (GaN) is a further example of the semiconductorsubstrate material. According to an embodiment, the term “semiconductorsubstrate” may comprise a suitable semiconductor carrier includingepitaxial semiconductor layers.

The term “vertical” as used in this specification intends to describe anorientation which is arranged perpendicular to the first surface of thesemiconductor substrate or semiconductor body.

The terms “lateral” and “horizontal” as used in this specificationintend to describe an orientation parallel to a first surface of asemiconductor substrate or semiconductor body. This can be for instancethe surface of a wafer or a die.

The Figures and the description illustrate relative dopingconcentrations by indicating “−” or “+” next to the doping type “n” or“p”. For example, “n⁻” means a doping concentration which is lower thanthe doping concentration of an “n”-doping region while an “n⁺”-dopingregion has a higher doping concentration than an “n”-doping region.Doping regions of the same relative doping concentration do notnecessarily have the same absolute doping concentration. For example,two different “n”-doping regions may have the same or different absolutedoping concentrations. In the Figures and the description, for the sakeof a better comprehension, often the doped portions are designated asbeing “p” or “n”-doped. As is clearly to be understood, this designationis by no means intended to be limiting. The doping type can be arbitraryas long as the described functionality is achieved. Further, in allembodiments, the doping types can be reversed.

As employed in this specification, the terms “coupled” and/or“electrically coupled” are not meant to mean that the elements must bedirectly coupled together —intervening elements may be provided betweenthe “coupled” or “electrically coupled” elements. The term “electricallyconnected” intends to describe a low-ohmic electric connection betweenthe elements electrically connected together.

As used herein, the terms “having”, “containing”, “including”,“comprising” and the like are open ended terms that indicate thepresence of stated elements or features, but do not preclude additionalelements or features. The articles “a”, “an” and “the” are intended toinclude the plural as well as the singular, unless the context clearlyindicates otherwise.

FIG. 1A illustrates a cross-sectional view of a semiconductor deviceaccording to an embodiment. The semiconductor device 1000 shown in FIG.1A is formed in semiconductor substrate 100 and includes a first mainsurface 110 and a second main surface 150, the second main surface 150disposed on an opposite side of the semiconductor substrate, oppositefrom the first main surface 110. A source region 140 of a firstconductivity type is disposed adjacent to the first main surface 110.The source region 140 is formed in a body region 130 of a secondconductivity type. A drift zone 120 is disposed in a lower portion ofthe semiconductor substrate. The drift zone 120 may be doped with thefirst conductivity type and, for example, comprise a portion of a lowerimpurity concentration (n−) and a portion of a higher impurityconcentration (n+). A back side region 160 of the second conductivitytype is disposed adjacent to the second main surface 150.

The semiconductor device 1000 comprises a transistor cell that includesthe drift zone 120, the body region 130, the source region 140 and theback side region 160. The transistor cell further comprises an activetrench 1100 that is formed in the first main surface 110 and extends tothe drift region 120. A dielectric layer 1130 may be disposed adjacentto sidewalls 1110 and the bottom side 1120 of the active trench 1100.Further, a conductive material 1140 may be disposed in the active trench1100. The transistor cell further comprises a body trench 1200 that isformed in a first main surface 110 and that extends to the drift region120. The body trench 1200 extends across the body region 130 to thedrift region 120. The body trench 1200 is adjacent to the body region130 and the drift region 120. An insulating layer 1250 is disposedadjacent to sidewall 1210, 1230 and at a bottom side 1240 of the bodytrench 1200. Further, a conductive layer 1260 is disposed in the bodytrench 1200. The insulating layer 1250 may be disposed so as to insulatethe conductive layer 1260 from the substrate material. As is shown inFIG. 1A, several or a plurality of transistor cells may be disposedadjacent to each other. The transistor cells may be connected inparallel to each other to form a transistor cell array.

The insulating layer 1250 is asymmetric with respect to an axis A thatextends perpendicular with respect to the first main surface 110 and isdisposed at a middle position or center of the body trench 1200.According to an embodiment, this feature may mean that the insulatinglayer 1250 has an asymmetric shape with respect to axis A. For example,as is shown in FIG. 1A, the insulating layer 1250 has a different shapeon the right-hand side of the body trench 1200 then on the left-handside of the body trench. Accordingly, insulating layer 1250 has anasymmetric shape with respect to a middle-axis A that extendsperpendicularly with respect to the main surface and is disposed at amiddle position of the body trench. The middle axis forms a plane thatextends perpendicular to a line connecting the active trench 1100 andthe body trench 1200. For example, the insulating layer 1250 may have alarger thickness on the right-hand side of the trench than on theleft-hand side. To be more specific, at a position close to the activetrench 1100, the layer thickness of the dielectric layer 1250 isdecreased with respect to a side remote from the active trench 1100.According to a further embodiment, the feature that the insulating layeris asymmetric with respect to the middle axis may mean that the bodytrench 1200 has an asymmetric shape. For example, a side of the bodytrench 1200 adjacent to the active trench 1100 may extend to a smallerdepth than the side of the body trench that is remote from the activetrench 1100.

As is illustrated in FIG. 1A, at a bottom side 1240 of the trench, thedielectric layer 1250 may have a step-like shape so that the thicknessof the dielectric layer 1250 increases from a position close to theactive trench 1100 to a position remote from the active trench 1100.According to an embodiment, the thickness of the dielectric layer 1250may be about 100 nm on a side facing the active trench 1100 and may beabout 300 nm on a side remote from the active trench 1100.

The body trench 1200 may have a width w₁ and a depth d₁. The width w₁ ofthe body trench 1200 may be different from a width of the gate trench1100. For example, the width w₁ may be larger than the width of theactive trench 1100. Further, the depth d₁ of the trench 1200 may belarger than the depth of the active trench 1100.

According to a further embodiment, the asymmetric feature of theinsulating layer may mean that, for example, the insulating layer has acomposition and, thus, dielectric constant on a side closer to theactive trench 1100 different from a composition and, thus, dielectricconstant on a side remote from the active trench 1100. According to afurther embodiment, this feature may mean, that fixed chargescomprising, for example, ions of Cs or Al, may be disposed in anasymmetrical manner in the body trench 1200. For example, the number orkind of fixed charges may be different between a sidewall adjacent tothe active trench 1100 and a sidewall remote from the active trench1100.

The source portion 140 is connected via a source electrode 145 to asource potential. A back side electrode 180 is disposed in contact withthe back side region 160. The conductive material 1260 inside the bodytrench 1200 may be connected via a conductive line 170 with the sourcepotential. According to the embodiment shown in FIG. 1A, the body region130 may be connected to source potential. Optionally, a body contactregion 131 may be disposed between the body region and the electrode forconnecting with source potential. The body contact region 131 may beheavily doped with the second conductivity type. One or two sourceregions 140 a, 140 b may be disposed at one or two sides of the bodytrench. For example, the source region 140 a at the left-hand side ofthe body trench 1200 may be connected with the source terminal.According to a further example, the source region 140 b at theright-hand side of the body trench 1200 may be connected with the sourceterminal. The body trench 1200 may be distinguished from the activetrench due to the different terminal that is connected to the conductivematerial 1140 disposed in the active trench 1100 compared with theterminal that is connected to the conductive material 1260 that isdisposed in the body trench 1200.

When a predetermined voltage V_(ce) is applied between the back sideelectrode 180 and the source electrode 145, and a predetermined voltageV_(g) is applied between the gate electrode 1140 and the sourceelectrode 145, that is, when the gate is turned on, a conductive channelis formed in the body region 130 at a portion adjacent to the gateelectrode 1140. When the conductive channel is formed, electrons flowfrom the source region 140 to the drift region 120. The electrons causea forward bias between the back side region 160 and the drift region120, and holes move from the back side electrode via the back sideregion 160 and, optionally, the n⁺-layer into the drift region 120. Thisresults in a great reduction of resistance of the drift region 120 dueto conductivity modulation, increasing the current capacity of the IGBT.A voltage drop between the back side electrode 180 and the sourceelectrode 145 of the IGBT at this time is referred to as an on-statevoltage (V_(ce)(sat)).

When the gate is turned off, i.e. a gate voltage V_(ge) between the gateelectrode 1140 and the source region 140 is reduced to zero orreverse-biased, no channel region as formed in the body region 130.Accordingly, the flow of electrons from the source region 140 stops.Thereafter, the electrons and holes accumulated in the drift region 120either move to the back side region 160 and source region 140,respectively, or recombine to disappear.

Generally, there is a trade-off between the on-resistance of the IGBT,which is mainly determined by the resistance of the drift region 120,and the breakdown voltage.

In a semiconductor device illustrated in FIG. 1A, a gate-feedback can bedecreased due to the presence of the specific body trenches 1200 inwhich the insulating layer has the asymmetric shape. As a consequence, amaximum gradient of the current dI_(c)/dt may be better controlled bysetting a corresponding gate resistance.

FIG. 1B shows a semiconductor device according to a further embodiment.As is shown, the semiconductor device 1000 of the embodiment illustratedin FIG. 1B is similar to the semiconductor device illustrated in FIG.1A. Further, the semiconductor device 1000 of FIG. 1B includes a secondand a third body trench 1300, 1400. The body trenches 1300 and 1400 areformed in the first main surface 110 of the semiconductor substrate 100.For example, the second body trench 1300 may extend to a depth d₂ andmay have a width w₂. According to an embodiment, d₂ may be differentfrom d₁, for example, d₂ may be greater than d₁. Moreover, w₂ may bedifferent from w₁, for example, w₂ may be greater than w₁. A dielectriclayer 1340 is disposed adjacent to the sidewalls 1310, 1320 and thebottom side 1330 of the second trench 1300. Further, the second bodytrench 1300 may be filled with a conductive material 1350. For example,the dielectric layer 1340 may have a homogeneous shape. In other words,the thickness of the second dielectric layer 1340 may be equal at thefirst sidewall 1310, at the second sidewall 1320, and at the bottom side1330. According to a further embodiment, the thicknesses of thedielectric layer 1340 may be different at the respective walls of thesecond body trench 1300.

The third body trench 1400 also comprises a dielectric layer 1440 and aconductive layer 1450. The dielectric layer 1440 may be homogeneous, forexample, and may have an equal thickness at each of the sidewalls 1410,1420 and at a bottom side 1430. Alternatively, the thicknesses of thedielectric layer 1440 may be variable. The distance between the firstand the second body trenches 1200, 1300 s₁ may be different from adistance s₂ between the second body trench 1300 and the third bodytrench 1400. According to further embodiments, s₁ may be equal to s₂.According to an embodiment, the conductive filling of the body trenches1300 and 1400 may be connected with source potential or with a gatepotential. Further, the conductive filling of some of the body trenchesmay be connected to source potential, others being connected to the gatepotential. As is, for example, illustrated in FIG. 1B, the conductivefilling 1350 of the second body trench 1300 may be connected with sourcepotential, and the conductive filling 1450 of the third body trench 1400may be connected with the gate potential.

According to the embodiment of FIG. 1B, in addition to the first bodytrench having the configuration as described above with reference toFIG. 1A, further body trenches 1300, 1400 may be disposed in the firstmain surface 110. The transistor cell may comprise only a second bodytrench or a higher number of trenches than 3. The source region 140 athat is disposed on the left-hand side of the first body trench 1200 maybe connected with a source terminal. The source regions 140 disposedadjacent to the second and the further body trenches may not beconnected with the source terminal. According to an embodiment, thesecond and the further body trenches 1300, 1400 are distinguished fromthe active trench 1100 by the feature that source regions adjacent tothe second and the further body trenches 1300, 1400 are not connected tothe source terminal so that the second and further body trenches are“inactive” trenches. According to a further embodiment, for example, thefirst and the second body trenches 1200, 1300 are distinguished from theactive trench 1100, since the conductive material 1140 inside the activetrench 1100 is connected with a gate terminal, whereas the conductivematerial 1260 within the first trench 1200 and the conductive material1350 within the second trench 1300 is connected with the sourceterminal. According to an embodiment, the body region 130 betweenarbitrary body trenches may be connected with the source terminal, forexample, by means of a further body contact region 131.

According to an embodiment, the second, third and, optionally furtherbody trenches may have a similar structure as the first body trench.According to this embodiment, merely the insulating layer of the second,third and, optionally further body trenches is different from theinsulating layer of the first body trench. According to this embodiment,the insulating layer of the second, third and, optionally further bodytrenches may have the same shape.

According to an embodiment, a first thickness of the insulating layer inthe first body trench 1200 on a sidewall 1210 adjacent the active trench1100 is different from a second thickness of the insulating layer in thefirst body trench 1200 on the sidewall 1230 remote from the activetrench 1100. The first thickness is approximately equal to the thicknessof the gate insulating layer 1130, and the second thickness isapproximately equal to the thickness of the insulating layer 1340, 1440in the additional body trenches 1300, 1400.

According to a further embodiment, the second, third, and, optionallyfurther body trenches may have a structure different from the structureof the first body trench or may have a structure that is mutuallydifferent. According to the embodiment shown in FIG. 1B, the gatefeedback in the semiconductor device may be further increased. As aconsequence, a maximum gradient of the current dI_(c)/dt may be bettercontrolled by setting a corresponding gate resistance. Although notspecifically illustrated in FIG. 1B, several or a plurality oftransistor cells may be disposed adjacent to each other, in a similarmanner as in FIG. 1A. The transistor cells may be connected parallel toeach other to form a transistor cell array.

As shown in FIG. 2A, an gate potential insulated gate bipolar transistor(IGBT) or semiconductor device 2000 according to an embodiment comprisesa transistor cell, and the transistor cell includes a drift region 120of a first conductivity type, a body region 130 of a second conductivitytype, the body region 130 being disposed between the drift region 120and the first main surface 110. The transistor cell comprises an activetrench 2100 that is formed in the first main surface 110 and thatextends to the drift region 120, a gate conductive layer 1140 beingdisposed in the active trench 2100. The transistor cell furthercomprises a source region 140 of the first conductivity type, formed inthe body region 130 adjacent to the active trench 2100. The transistorcell further comprises at least a first and a second body trench 2200,2300 and, optionally, a third trench 2400 or even more body trenchesformed in the first main surface 110 and extending to the drift region120. The body trenches 2200, 2300 are adjacent to the body region 130and the drift region 120. Source regions 140 a, 140 b may be disposedadjacent to the body trenches in a similar manner as shown in FIG. 1B.According to an embodiment, at least one of the source regions 140 b,140 a disposed between adjacent body trenches is disconnected from asource terminal, and the adjacent body trench implements an “inactive”trench.

According to an embodiment, a body region 130 may be connected with thesource potential via a source contact portion 131. An insulating layer2250, 2340 is disposed at sidewalls 2210, 2230, 2310, 2320 and at abottom side 2240, 2330 of each of the body trenches 2200, 2300. Aconductive layer 2260, 2350 is disposed in each of the body trenches2200, 2300. The insulating layer 2250, 2340 in the body trenches 2200,2300 may insulate the conductive layer 2260, 2350 from the adjacent bodyregion 130 and drift region 120. At least one of the first and secondbody trenches 2200, 2300 is different from the active trench 2100.

Within the context of the present specification, the term “is different”is intended to mean that at least one of the first and second bodytrenches 2200, 2300 differs from the active trench 2100 with respect toshape, material(s) in the trench and electrical connection. For example,the width w₁, w₂ of at least one of the body trenches 2200, 2300 may bedifferent from the width of the active trench 2100. This feature mayalternatively or additionally mean that the depth d₁, d₂ of the first orsecond body trench 2200, 2300 may be different from the depth of theactive trench 2100. According to a further embodiment, this feature maymean that the thickness of the insulating layer 2230, 2340 of the firstor second body trench 2200, 2300 may be different from a thickness ofthe dielectric layer 2130 within the active trench. According to still afurther embodiment, this feature may mean that the dielectric layer2250, 2340 of the first or second body trench has a composition and,consequently, a dielectric constant that is different from that of thedielectric layer 2130 of the active trench 2100. Further, the distancebetween the first and the second body trenches 2200, 2300 s₁ may bedifferent from a distance s₂ between the second body trench 2300 and thethird body trench 2400. In addition, this feature may mean, that theconductive filling of the respective trenches is connected withdifferent potentials. For example, the conductive filling 2260, 2350 ofthe first and the second body trenches 2200, 2300 may be connected withsource potential, and the conductive layer 2450 inside the third bodytrench 2400 may be connected with the gate potential. According to afurther embodiment, this feature may mean that the cross-sectional shapeof the respective trenches is different, the cross-section being takenin a plane parallel to the first main surface of the substrate.

Further, the thicknesses of the dielectric layers 2250, 2330, 2430 atthe sidewall 2210, 2310, 2410 closer to the active trench 2100, at thesidewall 2230, 2320, 2420 remote from the active trench 2100 and at thebottom side 2240, 2330, 2430 may be equal or different from each other.Further, the thicknesses t_(2,1), t_(2,2), t_(2,3) may be equal to thethicknesses t_(3,1), t_(3,2), t_(3,3) of the second body trench and,optionally, t_(4,1), t_(4,2), t_(4,3), of the third body trench 2400.

According to a further embodiment, fixed charges comprising, forexample, ions of Cs or Al, may be disposed in any of the active trenchor the body trenches. For example, the number or kind of fixed chargesmay be different between any of the body trenches or may be differentbetween at least one of the body trenches and the active trench.According to still another embodiment, the fixed charges may be presentin an asymmetric manner in the body trench or in the active trench.Although not specifically illustrated in FIG. 2A, a semiconductor devicemay comprise several or a plurality of the discussed transistor cellsdisposed adjacent to each other. For example, the transistor cells maybe connected parallel to each other to form a transistor cell array.

According to an embodiment, a semiconductor device 2000 comprises adrift region 120 of a first conductivity type, a body region 130 of asecond conductivity type between the drift region 120 and the first mainsurface 110. The semiconductor device 2000 further comprises an activetrench 2100 at the first main surface 110 extending into the driftregion 120, a gate insulating layer 2130 at sidewalls and at a bottomside of the active trench 2100 and a gate conductive layer 2140 in theactive trench 2100. The semiconductor device 2000 further comprises asource region 140 of the first conductivity type in the body region 130adjacent to the active trench 2100 and a first body trench 2200 at thefirst main surface 110 extending into the drift region 120, the bodytrench 2200 being adjacent to the body region 130 and to the driftregion 120. An insulating layer 2250 is disposed at sidewalls and at abottom side of the body trench 2200, the insulating layer 2250 having alarger thickness than a thickness of the gate insulating layer 2130.Further, a conductive layer 2260 is disposed in the body trench 2200. Inthe context of the present specification, the term “the insulating layerhas a larger thickness” is intended to mean that, if for example, theinsulating layer has a homogenous layer thickness, any thickness of thegate insulating layer, e.g. measured at the bottom side or at sidewallsof the active trench 2100 is smaller than the thickness of insulatinglayer. If the thickness of the insulating layer varies, for example, thethickness at sidewalls is different from the thickness at the bottomside, the corresponding portions of the insulating layers have to becompared. For example, at the bottom side, the gate insulating layer hasa smaller thickness than the insulating layer and at the sidewalls thegate insulating layer has a smaller than the insulating layer.

FIG. 2B shows a cross-sectional view of a semiconductor device accordingto a further embodiment. In FIG. 2B the same reference numeralsdesignate the same elements as in FIG. 2A. In contrast to the embodimentshown in FIG. 2A, the body trenches 2200, 2300 include a conductivematerial 2260, 2350 that is connected with the source terminal and thebody trenches 2200, 2300 may be identical. The body trench 2400 includesa conductive material 2450 that is connected with the gate terminal isand trench 2400 is different from the other body trenches. In thecontext of the present embodiment, the term “is different” has the samemeaning as defined above. For example the body trench 2400 that isconnected with the gate terminal may have a deeper depth than the bodytrenches 2200, 2300 that are connected with the source terminal. In sum,according to this embodiment, the body trenches that are connected to afirst terminal are identical, and body trenches that are connected to asecond terminal different from the first terminal, are different fromthe body trenches connected to the first terminal.

The semiconductor device 2000 of FIG. 2A further comprises similarcomponents as the semiconductor device shown in FIGS. 1A and 1B, thesecomponents being designated by corresponding reference numerals.

According to a further embodiment, a semiconductor device comprises atransistor cell, and the transistor cell includes a drift region 120 ofa first conductivity type, a body region 130 of a second conductivitytype, the body region 130 being disposed between the drift region 120and the first main surface 110. The transistor cell comprises an activetrench 2100 that is formed in the first main surface 110 and thatextends to the drift region 120, a gate conductive layer 1140 beingdisposed in the active trench 2100. The transistor cell furthercomprises a source region 140 of the first conductivity type, formed inthe body region 130 adjacent to the active trench 2100. The transistorcell further comprises at least a first and a second body trench 2200,2300 and, optionally, a third trench 2400 or even more body trenchesformed in the first main surface 110 and extending to the drift region120. The body trenches 2200, 2300 are adjacent to the body region 130and the drift region 120. An insulating layer 2250, 2340 is disposed atsidewalls 2210, 2230, 2310, 2320 and at a bottom side 2240, 2330 of eachof the body trenches 2200, 2300. A conductive layer 2260, 2350 isdisposed in each of the body trenches 2200, 2300. The first body trench2200 may be different from the second body trench 2300. Moreover, thethird body trench 2400 is different from at least one of the first andsecond body trenches 2200, 2300. For example, the semiconductor device2000 may be an Insulated Gate Bipolar Transistor (IGBT).

The feature “is different” as used within the context of this embodimenthas the same meaning as explained above.

Example 1

Simulations have been performed for an IGBT that is designed towithstand a voltage of 1200 V and in which the thickness of thedielectric layer (SiO₂) in the active trench is 100 nm, whereas thethickness of the dielectric layer (SiO₂) of the first, second and thirdbody trenches is 300 nm. Lines of equal potential have been determinedfor a gate voltage of 0 V and a voltage between source electrode 145 andback side electrode 180 of V_(ce)=600 V. The source region 140 and thedrift region 120 are n-doped, whereas the body region 130 and the backside region 160 are p-doped. The conductive layer 2260, 2350, 1450 ofthe first, second and third body trenches 2200, 2300, 2400 is connectedwith the source potential (0 V). The distribution of lines of equalpotential in the IGBT according to this example shows that, due to thethicker oxide layer in the body trenches, the potential between the bodytrenches is shifted to more positive values.

As such, an increase of the gate-feedback is realized in comparison toan IGBT of a reference example. The increased gate-feedback results inimproved electrical characteristics which will be discussed below.According to this reference example, the thickness of the silicon oxidelayer in each of the first, second and third body trenches is equal tothe thickness of the silicon oxide layer in the active trench, forexample 100 nm. The further structure of the IGBT according to thereference example is similar to the structure of the IGBT of Example 1except for the thickness of the dielectric layer in the body trenches.

FIG. 3A illustrates on the left-hand axis the simulated maximumovervoltage V_(ce,max) between back side electrode 180 and sourceelectrode 145 in dependence from the switch-off energy E_(off). Thedifferent points represent the overvoltage determined at different gateresistivities between 0 and 200 Ohm. The maximum overvoltage V_(CE,max)between back side electrode 180 and source electrode 145 is a measurefor the maximum gradient of the back side electrode current dI_(c)/dt,wherein curve 1) of the solid lines denotes the characteristics of theIGBT according to example 1, whereas curve 2) of the solid lines denotesthe characteristics of an IGBT according to a comparative example. Ascan be seen from a comparison of curve 1) with curve 2), a voltage spikeoccurs in curve 2) whereas no voltage spike occurs in curve 1).

The right-hand axis of FIG. 3A denotes the steepness of the simulatedvoltage (dV_(ce)/dt) when switching off as a function of the switch-offenergy E_(off). In a similar manner as in FIG. 3A, the different pointsrepresent the overvoltage determined at different gate resistivitiesbetween 0 and 200 Ohm. As can be seen from a comparison of curve 1) withcurve 2) of the broken lines, the current gradient may be betteradjusted using the IGBT structure of example 1 than according to thecomparative example.

FIG. 3B illustrates a simulation result of V_(ce,max) depending on thegate resistivity for different thicknesses of the silicon oxide withinthe first, second and third body trenches. In FIG. 3B, curve 1) denotesthe result for a thickness of the insulating layer in the body trenchesof 500 nm, curve 2) denotes the result for a thickness of the insulatinglayer in the body trenches of 400 nm, curve 3) denotes the result for athickness of the insulating layer in the body trenches of 200 nm, andcurve 4) denotes the result for a thickness of the insulating layer inthe body trenches of 100 nm. As can be seen from FIG. 3B, theovervoltage of the IGBT can be adjusted by adjusting the thickness ofthe oxide layer within the body trenches.

FIG. 3C shows a further simulation of dV_(ce)/dt when turning off as afunction of the gate resistance for the IGBT having differentthicknesses of the oxide layer in the body trenches. Curve 1) denotesthe result for a thickness of the insulating layer in the body trenchesof 500 nm, curve 2) denotes the result for a thickness of the insulatinglayer in the body trenches of 400 nm, curve 3) denotes the result for athickness of the insulating layer in the body trenches of 200 nm, andcurve 4) denotes the result for a thickness of the insulating layer inthe body trenches of 100 nm. As can be seen in FIG. 3C, the overvoltagebetween back side electrode 180 and source electrode 145 can be betteradjusted at low gate resistances by increasing the thickness of theoxide layer within the body trenches.

FIG. 4A shows a semiconductor device according to a further embodiment.The semiconductor device 4000 according to the embodiment shown in FIG.4A is formed in a semiconductor substrate 100 including a first mainsurface 110 and a second main surface 150, the second main surface 150opposite to the first main surface 110. The semiconductor device 4000comprises a drift region 120 of a first conductivity type, a body region130 of a second conductivity type, the body region 130 disposed betweenthe drift region 120 and the first main surface 110. The semiconductordevice 4000 additionally comprises a first transistor cell 4500 and asecond transistor cell 4600. Each of the transistor cells 4500, 4600comprise an active trench 4100, 4400 that is formed in the first mainsurface 110 and that extends to the drift region 120. The semiconductortransistor cells 4500, 4600 further comprise active source regions 140of the first conductivity type. A gate conductive layer 4140, 4440 isdisposed in the active trench 4100, 4400 and the active source regions140 are disposed in the body region 130 adjacent the active trench 4100,4400. The semiconductor device 4000 further comprises a plurality offurther gate trenches disposed between the first and the secondtransistor cells, and further source regions 140 of the firstconductivity type are disposed adjacent to the further gate trenches.Although FIG. 4A shows only two further gate trenches 4200, 4300, thenumber of further gate trenches may be more than two.

The further gate trenches 4200, 4300 and the active trenches 4100, 4400are connected with a gate potential. At least one of the further sourceregions, 140 is not connected with the source potential. Accordingly,the semiconductor device comprises so-called inactive gate trenches4200, 4300 at which no conductive channel is formed in case of anon-voltage being applied to the gate electrode.

Due to the special structure illustrated in FIG. 4A, by arbitrarilyconnecting any of the source contacts 4750, 4850 with the sourcepotential, the channel width of the semiconductor device 4000 may bechanged and, thus, the characteristics of the semiconductor device maybe adjusted. According to an embodiment, the trenches 4200, 4300, and4400 may be identical to each other and to the active trench 4100.According to a further embodiment, at least one of the trenches 4200,4300, and 4400 may be different from the other trenches of from theactive trench 4100. In this context, the term “is different” has thesame meaning as explained above.

FIG. 4B shows a further embodiment of a semiconductor device. Thesemiconductor device comprises a first transistor cell 4500 and a secondtransistor cell 4600. In addition to the embodiment shown in FIG. 4A,the semiconductor device 4000 further comprises at least one body trench4700 that may be connected with source potential. The further componentsof the semiconductor device of FIG. 4B are similar to respectivecomponents of the semiconductor device of FIG. 4A. Accordingly, each ofthe first and second transistor cells 4500, 4600 comprises an activetrench 4100, 4400 being formed in the first main surface and extendingto the drift region 120. A gate conductive layer 4140, 4440 is disposedin the active trench 4100, 4400 and the source regions 140 are formed inthe body region 130 adjacent to the active trenches 4100, 4400. Thesemiconductor device 4000 further comprises a first and a second bodytrench 4200, 4700, disposed between the first and the second transistorcells 4500, 4600, the first and the second body trenches 4200, 4700formed in the first main surface 110 and extending to the drift region120. Optionally, further body trenches 4300 may be disposed between thefirst and the second transistor cells 4500, 4600. The body trenches4200, 4300, 4700 are adjacent to the body region 130 and the driftregion 120. The conductive material 4260, 4350, 4740 in each of thetrenches 4200, 4300, 4700 is insulated from adjacent semiconductormaterial by means of the insulating layer 4250, 4340, 4730. The firstbody trench 4200 is connected with a source potential, and the secondbody trench 4700 is connected with the gate potential. According toembodiments, some or all of the contacts 4270, 4370, 4470, 4570 may beconnected with the source potential. Further, the contacts 4270, 4370,4470, 4570 may be arranged so as to contact the respective body contacts131 and, optionally, additionally the source regions. Thereby, theeffective channel width of the transistor may be further influenced.

According to an embodiment, the body trenches further from the activetrench 4100 than other body trenches are connected with the gatepotential, whereas those body trenches disposed close to the activetrench are connected with the source potential. As such, the currentfeed-back to the gate potential may be further decreased since thelateral current flow at a depth corresponding to the depth of the bottomof the trenches is concentrated in the vicinity of the active gatetrenches and mainly flows under body trenches that are held at sourcepotential.

The body trenches 4200, 4300 and 4700 may be identical to each other andmay be identical to the active trench 4100. According to a furtherembodiment, the body trenches 4200, 4300 and 4700 may be identical toeach other and may be different from the active trench 4100. Further, atleast one of the body trenches 4200, 4300 and 4700 may be different fromthe other body trenches. For example, the body trench 4700, that isconnected with the gate terminal, may be different from the other bodytrenches 4200, 4300 that are connected with the source terminal. Forexample, the body trench 470000 may extend to a deeper depth than theother body trenches 4200, 4300. The body trench 4700 may be identicalwith or different from the active trench 4100. In this context, the term“is different” has the same meaning as explained above.

According to the embodiment illustrated in FIGS. 4A and 4B, asemiconductor device 4000 formed in a semiconductor substrate 100includes a first main surface 110 and comprises a drift region 120 of afirst conductivity type, a body region 130 of a second conductivitytype, the body region 130 disposed between the drift region 120 and thefirst main surface 110, a first transistor cell 4500 and a secondtransistor cell 4600, each of the first and second transistor cells4500, 4600 comprising an active trench 4100, 4400 at the first mainsurface 110 and extending into the drift region 120, a gate conductivelayer 4140, 4440 disposed in the active trench 4100, 4400, and a sourceregion 140 formed in the body region 130 adjacent to the active trench4100, 4400. The semiconductor device further comprises body trenches4200, 4300, 4700 disposed between the first 4500 and the secondtransistor cells 4600 and further source regions 140, the body trenches4200, 4300, 4700 formed in the first main surface 110 and extending intothe drift region 120, the body trenches 4200, 4300, 4700 adjacent to thebody region 130 and the drift region 120. A conductive material in atleast one of the body trenches 4200, 4300, 4700 is connected with a gateterminal and at least one of the further source regions 140 disposedbetween the body trenches being disconnected from a source terminal.

Example 2

The semiconductor device according to Example 2 comprises a transistorcell including a first, a second and a third body trench, so that sixbody trenches are disposed between two active trenches. The first andsecond body trenches are held at source potential, and the third bodytrench is held at gate potential. According to a reference example, thefirst, second and third body trenches are held at source potential.

FIGS. 5A and 5B show results of simulations of an IGBT according toexample 2 in comparison with a reference example. FIG. 5A shows themaximum gradient of the current dI_(C)/dt as a cause of the maximumovervoltage V_(CE,max) between back side electrode 180 and sourceelectrode 145 as a function of the external gate resistance. As seen incurve 1) the simulation result of Example 2 in comparison with curve2), 1) is better controllable in terms of maximum dI_(C)/dt.

FIG. 5B shows the maximum steepness of the voltage dV_(ce)/dt duringswitch off as a function of the gate resistance. As can be recognizedfrom FIG. 5B, the voltage gradient may be better adjusted by adjustingthe gate resistance according to example 2 (curve 1) in comparison tothe reference example (curve 2).

As a result, when using an IGBT according to an embodiment, by adjustingthe gate resistance, the switching behaviour of the IGBT may be adjustedaccording to the specific needs without changing the channel length.

As has been shown, according to embodiments, the current gradient andthe voltage gradient can be better adjusted by setting a correspondinggate resistance. As a consequence, it is possible to adapt the switchingbehaviour of the semiconductor device to the specific needs of specialapplications by setting a corresponding value of a series-resistanceconnected with the gate electrode.

The shown cross-sections views of the semiconductor devices or IGBTsillustrate only a part of an IGBT cell array. As an example, a geometryof the IGBT cells may be in the form of stripes including the severaltrenches extending parallel to each other in a direction perpendicularto the depicted plane of the cross-sectional views. According to furtherembodiments, the trenches may form different patterns.

While embodiments of the invention have been described above, it isobvious that further embodiments may be implemented. For example,further embodiments may comprise any sub-combination of features recitedin the claims or any sub-combination of elements described in theexamples given above. Accordingly, this spirit and scope of the appendedclaims should not be limited to the description of the embodimentscontained herein.

1-8. (canceled)
 9. A semiconductor device formed in a semiconductorsubstrate including a first main surface, comprising: a drift region ofa first conductivity type; a body region between the drift region andthe first main surface; a first transistor cell and a second transistorcell, each of the first and the second transistor cells comprising: anactive trench at the first main surface and extending into the driftregion; a gate conductive layer disposed in the active trench; and asource region formed in the body region adjacent to the active trench,the semiconductor device further comprising a first body trench and asecond body trench, the first body trench and the second body trenchbeing arranged adjacent to each other between the first and the secondtransistor cells, the first and the second body trenches being formed inthe first main surface and extending into the drift region, at least oneof the first and the second body trenches being different from theactive trench in shape.
 10. The semiconductor device of claim 9, whereina conductive material in at least one of the first and the second bodytrenches is connected with a source terminal.
 11. The semiconductordevice of claim 10, wherein a conductive material in the other one ofthe first and the second body trenches is connected with a gateterminal.
 12. The semiconductor device of claim 11, wherein a distancebetween the one of the first and the second body trenches connected withthe source terminal and the active trench is smaller than a distancebetween the one of the first and the second body trenches connected withthe gate terminal and the active trench.
 13. The semiconductor device ofclaim 9, wherein a conductive material in each of the first and thesecond body trenches is connected with agate terminal.
 14. (canceled)15. The semiconductor substrate of claim 9, further comprising a gatedielectric layer at sidewalls and at a bottom side of the active trench,wherein a thickness of the gate dielectric layer is smaller than athickness of an insulating layer in at least one of the first and thesecond body trenches.
 16. The semiconductor device of claim 9, wherein aconductive material in at least one of the first and the second bodytrenches is connected with a gate terminal.
 17. A semiconductor deviceformed in a semiconductor substrate including a first main surface,comprising: a drift region of a first conductivity type; a body regionbetween the drift region and the first main surface; a first transistorcell and a second transistor cell, each of the first and the secondtransistor cells comprising: an active trench at the first main surfaceand extending into the drift region; a gate conductive layer disposed inthe active trench; and a source region formed in the body regionadjacent to the active trench, the semiconductor device furthercomprising a first body trench and a second body trench, the first bodytrench and the second body trench being arranged adjacent to each otherbetween the first and the second transistor cells, the first and thesecond body trenches being formed in the first main surface andextending into the drift region, at least one of the first and thesecond body trenches being different from the active trench in at leastone material inside the active trench.
 18. The semiconductor device ofclaim 17, wherein a conductive material in at least one of the first andthe second body trenches is connected with a source terminal.
 19. Thesemiconductor device of claim 18, wherein a conductive material in theother one of the first and the second body trenches is connected with agate terminal.
 20. The semiconductor device of claim 19, wherein adistance between the one of the first and the second body trenchesconnected with the source terminal and the active trench is smaller thana distance between the one of the first and the second body trenchesconnected with the gate terminal and the active trench.
 21. Thesemiconductor device of claim 17, wherein a conductive material in eachof the first and the second body trenches is connected with a gateterminal.
 22. The semiconductor substrate of claim 17, furthercomprising a gate dielectric layer at sidewalls and at a bottom side ofthe active trench, wherein a thickness of the gate dielectric layer issmaller than a thickness of an insulating layer in at least one of thefirst and the second body trenches.
 23. The semiconductor device ofclaim 17, wherein a conductive material in at least one of the first andthe second body trenches is connected with a gate terminal.
 24. Asemiconductor device formed in a semiconductor substrate including afirst main surface, comprising: a drift region of a first conductivitytype; a body region between the drift region and the first main surface;a first transistor cell and a second transistor cell, each of the firstand the second transistor cells comprising: an active trench at thefirst main surface and extending into the drift region; a gateconductive layer disposed in the active trench; and a source regionformed in the body region adjacent to the active trench, thesemiconductor device further comprising a first body trench and a secondbody trench, the first body trench and the second body trench beingarranged adjacent to each other between the first and the secondtransistor cells, the first and the second body trenches being formed inthe first main surface and extending into the drift region, at least oneof the first and the second body trenches being different from theactive trench in functionality.
 25. The semiconductor device of claim24, wherein a conductive material in at least one of the first and thesecond body trenches is connected with a source terminal.
 26. Thesemiconductor device of claim 25, wherein a conductive material in theother one of the first and the second body trenches is connected with agate terminal.
 27. The semiconductor device of claim 26, wherein adistance between the one of the first and the second body trenchesconnected with the source terminal and the active trench is smaller thana distance between the one of the first and the second body trenchesconnected with the gate terminal and the active trench.
 28. Thesemiconductor substrate of claim 24, further comprising a gatedielectric layer at sidewalls and at a bottom side of the active trench,wherein a thickness of the gate dielectric layer is smaller than athickness of an insulating layer in at least one of the first and thesecond body trenches.
 29. The semiconductor device of claim 24, whereina conductive material in at least one of the first and the second bodytrenches is connected with a gate terminal.